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Blue cathodoluminescence from tantalum zinc oxide

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4 Author(s)
Langley, R.J. ; Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA ; Puchades, I. ; Kurinec, S.K. ; Potter, Michael D.

We have observed cathodoluminescence (CL) at low voltages (<50 V) with a peak at ~410 nm from tantalum zinc oxide, Ta2Zn3O8, (TZO). The thin films were prepared by reacting Ta with ZnO on silicon and silicon dioxide substrates at elevated temperatures (1200°C) using rapid thermal annealing. Subsequently, the bulk phase was synthesized from the powder raw materials, ZnO and Ta2O5 using ceramic techniques. The resulting material shows similar CL characteristics. No charging was observed during the CL measurements, indicating a conducting nature of the material. It is observed that TZO exhibits better blue both in thin film and bulk form, as compared to conventional ZnS:Ag, a blue CRT phosphor and zinc gallate, another low voltage blue phosphor

Published in:

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Date of Conference:

20-23 Jul 1997