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Statistical design for manufacturing software for low power radiation hardened SOI MOSFETs

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3 Author(s)
Phelps, M.J. ; Motorola Inc., Phoenix, AZ, USA ; Hess, G.T. ; Sanders, T.J.

This paper presents a new software tool called STADIUM-SOI which is employed by device engineers to statistically simulate silicon-on-insulator technologies. Using this software, it has been demonstrated that statistical simulation is an efficient way to investigate the effect of manufacturing variation on device yield for SOI processing

Published in:

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Date of Conference:

20-23 Jul 1997

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