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Teaching CMOS integrated circuit manufacturing laboratory using a student operated factory

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2 Author(s)
Fuller, L.F. ; Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA ; Hirschman, K.D.

At RIT we have been teaching integrated circuit processing laboratory courses for 15 years. In the last 5 years we have used p-well CMOS processes for the laboratory. We have developed techniques for teaching these courses that allow students to see the entire process, do all of the individual steps themselves, have working wafers to test early in the school term and obtain an introduction to manufacturing

Published in:

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Date of Conference:

20-23 Jul 1997