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Microfabrication activities at the University of Louisville

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7 Author(s)
Walsh, K. ; Speed Sci. Sch., Louisville Univ., KY, USA ; Hanley, T. ; Pitts, K. ; Hensel, D.
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This paper describes the new microfabrication effort presently underway at the University of Louisville. A 1500 square foot class 100/1000 cleanroom facility was completed in the 1997 Spring semester. The cleanroom contains a wide spectrum of microfabrication processing and test equipment. The new lab supports a broad range of interdisciplinary research projects and will be utilized in the upcoming 1997 Fall semester for a new NSF-sponsored undergraduate course in microfabrication. Details of the cleanroom and ongoing fabrication activities at the University of Louisville are presented

Published in:

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Date of Conference:

20-23 Jul 1997