Cart (Loading....) | Create Account
Close category search window

Comprehensive and Accurate Parasitic Capacitance Models for Two- and Three-Dimensional CMOS Device Structures

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Lacord, J. ; STMicroelectron., Crolles, France ; Ghibaudo, Gerard ; Boeuf, F.

In this paper, we propose an accurate, detailed, and ready-to-use model to evaluate quickly parasitic capacitances on several CMOS architectures: planar bulk, planar FDSOI, planar double gate (DG), and FinFET (in DG or triple-gate configuration). This model takes into account raised source drain, trench contacts and discreet contacts, bilayer spacers, and inner-fringe capacitance screening. It has been validated with 2-D (FlexPDE software) and 3-D (Raphael software) simulations.

Published in:

Electron Devices, IEEE Transactions on  (Volume:59 ,  Issue: 5 )

Date of Publication:

May 2012

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.