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Humidity hysteresis and temperature property of MWNT-SiO2 thin film humidity sensor at AC testing

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2 Author(s)
Li Tuo ; Dept. of Microelectron., Harbin Inst. of Technol., Harbin, China ; Liu Xiaowei

Multiwall carbon nanotubes(MWNTs)-SiO2 composite thin film humidity sensors are fabricated and humidity hysteresis and temperature property for different MWNTs contents at AC testing are investigated in this paper. Shapes diversity for humidity hysteresis curves of different MWNTs proportion sensors are analyzed by capillary condensation effect. Sensors temperature property at 200 kHz frequency are based on the dielectric relaxation theory in dielectric physics. Sensor conductance increases as temperature rises because relaxation time is greatly infected by temperature. Sensitivity of sensors is also improved with the increasing temperature.

Published in:
Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on

Date of Conference: 12-16 Oct. 2011

Page(s):
272 - 274
Print ISBN:
978-1-4577-0794-0
INSPEC Accession Number:
12576652
Conference Location :
Harbin
Digital Object Identifier :
10.1109/AISMOT.2011.6159371
Product Type:
Conference Publications

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