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An accurate physics-based method for calculating DC inductance of on-chip square multi-layer inductors

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3 Author(s)
Jinran Du ; Dept. of Electron. of Sci. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China ; Wanghui Zou ; Xuecheng Zou

An accurate physics-based method for calculating DC inductance of on-chip square multi-layer inductors is proposed in this paper. All inductor size parameters are considered in the method including metal thickness and inter-layer space. Due to its physics-based nature, the proposed method is scalable. The accuracy of the method is evaluated by comparing the calculated value with the EM simulation results in ADS for a complete set of inductors with different size parameters. It's shown that the error between calculated values and simulation values is typically within around 3%.

Published in:

ASIC (ASICON), 2011 IEEE 9th International Conference on

Date of Conference:

25-28 Oct. 2011