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High-frequency (>50 MHz) medical ultrasound linear arrays fabricated from micromachined bulk PZT materials

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4 Author(s)
Changgeng Liu ; Geospace Res. Inc., El Segundo, CA, USA ; Qifa Zhou ; Frank T. Djuth ; K. Kirk Shung

This paper describes the development and characterization of a high-frequency (65-MHz) ultrasound transducer linear array. The array was built from bulk PZT which was etched using an optimized chlorine-based plasma dry-etching process. The median etch rate of 8 μm/h yielded a good profile (wall) angle (>;83°) and a reasonable processing time for etch depths up to 40 μm (which corresponds to a 50-MHz transducer). A backing layer with an acoustic impedance of 6 MRayl and a front-end polymer matching layer yielded a transducer bandwidth of 40%. The major parameters of the transducer have been characterized. The two-way insertion loss and crosstalk between adjacent channels at the center frequency are 26.5 and -25 dB, respectively.

Published in:

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:59 ,  Issue: 2 )