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Hollow Square- and Ring-Plate MEMS Oscillators Embedded in a Phase-Locked Loop for Low Limit of Detection in Liquid

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3 Author(s)
Blanco-Gomez, G. ; DTBS, CEA-Leti, Grenoble, France ; Trioux, E. ; Agache, V.

This letter demonstrates hollow plate microelectromechanical-system oscillators implemented into a digital phase-locked loop (PLL). The resonators feature innovative geometries: hollow square and ring plates, operating in Lamé or Kirkhope modes, respectively, with resonance frequencies comprised between 24 and 78 MHz. Advantageously, the ring-plate resonator presents better frequency stability when compared with its counterpart square plate. The PLL provides a real-time monitoring of the oscillators' frequency shift, which was tested by changing the electrostatic actuation amplitude. Ring-plate resonators show sensitivity between 38 and 232 Hz/V. Finally, the feedback loop was operated with a square-plate device filled with an aqueous solution demonstrating a sensitivity of up to 284 Hz/V.

Published in:

Electron Device Letters, IEEE  (Volume:33 ,  Issue: 4 )