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Design and simulation of tin oxide nanoscale thin film gas sensors

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3 Author(s)
Chen Lin ; Department of microelectronics, Peking University, Beijing, 100871, China ; Dacheng Zhang ; Xiaodi Liu

Current crowding effects on the metal electrode and temperature uniformity on the tin oxide nanoscale thin film in the gas sensor are two of the most important concerns. They are mostly determined by the current density distribution of the heater and the temperature distribution of the gas sensing film. In order to improve the reliability and selectivity of the gas sensor, the geometry of the heater is optimized in this paper. Structures of heaters and tin oxide thin film gas sensors are modeled for optimization using ANSYS.

Published in:

Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE

Date of Conference:

18-21 Oct. 2011