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Fabrication and surface functionalization of single TiO2 nanotubes devices for bio-chemical sensors applications

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5 Author(s)
Mingun Lee ; University of Texas at Dallas, Richardson, 75080 USA ; Jie Huang ; Antonio Lucero ; Moon. J. Kim
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A single TiO2 nanotube device has been successfully fabricated using both FIB deposition technique and conventional Si process. The device shows linear I-V characteristics implying ohmic contact. The device shows conductance modulation when it is functionalized by lysine and GABA. Surface modification is confirmed by monitoring the resistance change of TiO2 nanotube. In this study, fabrication of single TiO2 nanotube devices and the effect on conductance of the nanotube devices by surface modification will be discussed for bio-chemcial sensor applications.

Published in:

Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE

Date of Conference:

18-21 Oct. 2011