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WR1.5 Silicon Micromachined Waveguide Components and Active Circuit Integration Methodology

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9 Author(s)
Kevin M. K. H. Leong ; Northrop Grumman Aerospace Systems, Redondo Beach, CA, USA ; Kelly Hennig ; Chunbo Zhang ; Raffi N. Elmadjian
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This paper describes the development of silicon micromachined waveguide structures operating in the WR1.5 waveguide band (500-750 GHz). Average waveguide loss of 0.15 dB/mm was measured at 600 GHz. Capabilities of the proposed approach have been shown with the development of a 570-GHz three-pole waveguide bandpass filter that has a 0.9-dB passband loss and a Y-junction coupler operating at 670 GHz. These components have been tested using a novel on-wafer testing method for rapid characterization throughput. A batch process approach for integration of solid-state devices and micromachined waveguide components has also been developed. Further development of this technology will lead to the next generation of terahertz-frequency wafer-level packaging of active circuits.

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IEEE Transactions on Microwave Theory and Techniques  (Volume:60 ,  Issue: 4 )