RF Harmonic Distortion of CPW Lines on HR-Si and Trap-Rich HR-Si Substrates

In this paper, the nonlinear behavior of coplanar waveguide (CPW) transmission lines fabricated on Si and high-resistivity (HR) Si substrates is thoroughly investigated. Simulations and experimental characterization of 50-
$\Omega$
CPW lines are analyzed under small- and large-signal operation at 900 MHz for a wide variety of Si substrates with nominal resistivities from 10
$\Omega\hbox{-cm}$
up to values higher than 10
$\hbox{k}\Omega\hbox{-cm}$
. The introduction of a trap-rich layer to recover the Si substrate nominal HR characteristics is also considered. We experimentally demonstrate that the distortion level of a CPW line lying on Si substrate decreases with the effective resistivity sensed by the coplanar structure. Si substrates of effective resistivity higher than 3
$\hbox{k}\Omega \hbox{-cm}$
present harmonic levels below
$-$
80 dBm for an output power of
$+$
15 dBm.