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Reduced-Size Low-Voltage RF MEMS X-Band Phase Shifter Integrated on Multilayer Organic Package

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4 Author(s)
Chung, D.J. ; Dept. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Polcawich, R.G. ; Pulskamp, J.S. ; Papapolymerou, J.

This paper presents an X-band two-bit phase shifter that integrates single-pole four-throw (SP4T) piezoelectric microelectromechanical switches with a compact 3-D passive design on a liquid crystal polymer (LCP) organic substrate. The multilayer LCP process allows a low-cost and lightweight circuit that can easily be integrated with other radio frequency front-end components, such as an antenna, at the packaging level. By routing lines onto embedded multilayers, a 22.5% reduction in area is achieved. In addition, low-loss piezoelectric SP4T switches with a 7 V actuation voltage are used to switch between different phase delays. The phase shifter exhibits a loss of 0.75 dB/bit with 2.25° average phase error at 10 GHz.

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Components, Packaging and Manufacturing Technology, IEEE Transactions on  (Volume:2 ,  Issue: 10 )