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Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to \hbox {C}_{60} Nanowire Testing

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4 Author(s)
Tsuchiya, T. ; Dept. of Micro Eng., Kyoto Univ., Kyoto, Japan ; Ura, Y. ; Sugano, K. ; Tabata, O.

In this paper, we report a test stand device for tensile testing nanoscale materials and its application to testing of a fullerene wire. We have developed an electrostatic microelectromechanical-systems tensile testing device which has a comb drive actuator to apply tensile force to a specimen and two capacitances for sensing the displacement to measure the elongation and applied force of the specimen. The force and displacement measurement resolutions have been demonstrated as 2 nN and 0.2 nm, respectively. A freestanding fullerene wire which was about 16 μm long, 2 μm wide, and 40 nm thick was integrated on the device, and the tensile testing of the wire was successfully demonstrated with nano-order resolutions. Measured Young's modulus and tensile strength of the wire were 5.9 GPa and 17 MPa, respectively.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 3 )