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Fuel cells are considered to be a possible alternative to battery technology for many years. But because of the too high production costs and the lack of long-term experience as well as the missing miniaturization of such systems there is no commercialisation. The aim of the Fraunhofer IKTS is the development of planar self-breathing μPEMFC system based on LTCC technology. By using this mass production technology together with multiple printed panels you can build highly compact and integrated micro fuel cell systems. The work presented here gives an insight into the development of μPEMFC system in various levels of integration and performance classes. They show the feasibility of miniaturization and cost reduction through integration of Balance of Plant (BoP) components and electronics in the bipolar plate of the fuel cell. Different sample systems give an outlook on possible approaches for further miniaturization.