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Requirements for microfluidic sensors based on ceramic technologies in high temperature chemical processes

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2 Author(s)
Hildebrandt, S. ; Electron. Packaging Lab., Tech. Univ. Dresden, Dresden, Germany ; Wolter, K.-J.

After a short introduction into one actual development in the field of chemical reaction engineering, the requirements resulting from the application of sensors in a chemical reactor are shown. Physical quantities of interest when investigating and running chemical reactions are specified. As an example, the implementation of a multi-channel temperature sensor is described. Due to the chosen sensor technology, it was necessary to find a working combination of a chemically resistant steel and an electrically insulating glass paste. The compatibility of steel grade 1.4571 and Heraeus SD 1000 glass is shown.

Published in:

Microelectronics and Packaging Conference (EMPC), 2011 18th European

Date of Conference:

12-15 Sept. 2011

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