By Topic

LTCC-based capacitive pressure sensor in a harsh environment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Darko Belavič ; HIPOT-RR d.o.o., Šentpeter 18, SI-8222 Otočec, Slovenia ; Marina Santo Zarnik ; Marko Hrovat ; Kostja Makarovič
more authors

In this paper the initial capacitances of pressure sensors consisting primarily of the capacitance of an air-gap capacitor and the parasitic capacitance of sensors realized with LTCC (low-temperature cofired ceramics) materials are described. The capacitances at different temperatures (from 10°C to 75°C) and different levels of humidity (from 20% to 80% relative humidity) were measured with an LCR meter at two frequencies, i.e., 10 and 100 kHz. At the lower humidity the temperature coefficient of the capacitance was around 200×10-6/K, while at the higher humidity the temperature dependence of the capacitance was much higher, up to 800×10-6/K. In all cases the dependences of the capacitance versus temperature were almost linear. The humidity has a significant and nonlinear influence on the capacitance at lower frequencies, while at higher frequencies the influence is smaller.

Published in:

Microelectronics and Packaging Conference (EMPC), 2011 18th European

Date of Conference:

12-15 Sept. 2011