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Deep-scaled CMOS technologies have provided ultra-high speed devices for implementing integrated millimeter wave and sub-millimeter wave system-on-a-chip (SoC). Achieving SoC necessitates key mm-wave/sub-mm-wave circuits, including signal generators and amplifiers. The paper will exemplify some of the key circuits in CMOS technologies, including a terahertz oscillator, a 450 GHz voltage controlled oscillator (VCO), a 200 GHz frequency divider, and a 200 GHz amplifier. With the availability of key building blocks, mm-wave/sub-mm-wave SoC will be realized in the near future.