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Effect of channel widths on negative shift of threshold voltage, including stress-induced hump phenomenon in InGaZnO thin-film transistors under high-gate and drain bias stress

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2 Author(s)
Sung-Hwan Choi ; School of Electrical Engineering and Computer Science, Seoul National University, Seoul, Korea ; Min-Koo Han

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.3679109 

We investigated the degradation of indium-gallium-zinc-oxide (IGZO) thin-film transistors (TFTs) for various channel widths under high-gate and drain bias stress. The threshold voltage of IGZO TFT with wide-channel width (W > 100 μm) was significantly shifted. This included stress-induced hump-effect in a negative direction after the stress, whereas IGZO TFT with narrow-channel width (W < 100 μm) shifted in a positive direction. This phenomenon may be attributed to the hole trapping into the back-interface region. In order to enhance the reliability of IGZO TFTs, we developed and verified that the multiple-channel device showed better bias-temperature stability (ΔVTH: -0.1 V), whereas the single-channel device exhibited a -0.4 VΔVTH shift.

Published in:
Applied Physics Letters  (Volume:100 ,  Issue: 4 )

Date of Publication: Jan 2012

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