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A bulk micromachined humidity sensor based on porous silicon

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5 Author(s)
G. M. O'Halloran ; Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands ; P. M. Sarro ; J. Groeneweg ; P. J. Trimp
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This paper reports on the development of a micromachined membrane humidity sensor. The sensor utilises the capacitance technique to measure relative humidity. The membrane, which acts as the dielectric, is made porous using a standard anodisation technique. The advantages of this type of construction compared to the standard bulk-type sensor are outlined. Also, a heating resistor is incorporated underneath the membrane. This acts as a reset to the device by driving out excess moisture

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:1 )

Date of Conference:

16-19 Jun 1997