By Topic

Scaling torsional cantilevers for scanning probe microscope arrays: theory and experiment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
S. A. Miller ; Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA ; K. L. Turner ; N. C. MacDonald

An array (12×12) of microelectromechanical probe tips with integrated actuators and capacitive sensors for scanning probe microscopy has been designed, fabricated, and characterized. Each array element consists of a single crystal silicon tip on a torsional cantilever with out-of-plane interdigitated electrode capacitors. The size of each array element is about 150 μm by 150 μm with a tip-to-tip spacing in the array of 200 μm. Given these dimensions, the packing density of the devices is about 2500 units/cm2. The out-of-plane torsional design allows for significant improvement in performance (larger tip displacement and increased sense capacitance) and a higher density of devices per unit area as the minimum feature size (MFS) decreases

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:1 )

Date of Conference:

16-19 Jun 1997