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Scaling torsional cantilevers for scanning probe microscope arrays: theory and experiment

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3 Author(s)
Miller, Scott A. ; Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA ; Turner, K.L. ; MacDonald, Noel C.

An array (12×12) of microelectromechanical probe tips with integrated actuators and capacitive sensors for scanning probe microscopy has been designed, fabricated, and characterized. Each array element consists of a single crystal silicon tip on a torsional cantilever with out-of-plane interdigitated electrode capacitors. The size of each array element is about 150 μm by 150 μm with a tip-to-tip spacing in the array of 200 μm. Given these dimensions, the packing density of the devices is about 2500 units/cm2. The out-of-plane torsional design allows for significant improvement in performance (larger tip displacement and increased sense capacitance) and a higher density of devices per unit area as the minimum feature size (MFS) decreases

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:1 )

Date of Conference:

16-19 Jun 1997