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Chemical performance and high temperature characterization of micromachined chemical reactors

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7 Author(s)
Srinivasan, R. ; Microsystems Technol. Lab., MIT, Cambridge, MA, USA ; Firebaugh, S.L. ; Hsing, I.-M. ; Ryley, J.
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Chemical throughput, product distribution, and lifetime studies have been conducted in Si micromachined chemical reactors (microreactors) for catalytic partial oxidation reactions. Experiments using Pt-catalyzed NH3 oxidation as model reaction show that conversion and selectivity behavior of conventional reactors can be reproduced in the microreactor. Highly flammable gases that explode in conventional reactors have been safely oxidized in the microreactor. Packaging and high-temperature materials degradation have been identified as technical challenges to commercial chemical production using microreactor systems

Published in:

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on  (Volume:1 )

Date of Conference:

16-19 Jun 1997