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Modeling of thermal conductivity and thermoelectric power factor in ultrathin SOI nanomembranes and silicon nanowires

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3 Author(s)
Aksamija, Z. ; Univ. of Wisconsin-Madison, Madison, WI, USA ; Knezevic, I. ; Ramayya, E.

Thermoelectric (TE) refrigeration using Si-based nanostructures is an attractive approach for on-chip thermal energy harvesting and targeted cooling of local hotspots [1] due to the ease of on-chip integration and the nanowires' enhanced TE figure of merit [2] ZT=S2σ/(κl+κe) [3]. Silicon-on-insulator (SOI) membranes [4] and membrane-based nanowires [3] and ribbons (Fig. 1) show promise for application as efficient thermoelectrics, which requires both high power factor S2σ (Fig. 2) and low thermal conductivity (Figs. 3-4).

Published in:

Semiconductor Device Research Symposium (ISDRS), 2011 International

Date of Conference:

7-9 Dec. 2011