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Design and fabrication of configurable digital controller interface for micro mirror projector ASIC

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6 Author(s)
Jianwen Luo ; Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore ; Peng Li ; Chin Yann Pang ; Gopalakrishnan, P.K.
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This paper presents the design and implementation of digital interface for micro mirror projection ASIC for MEMS scanner control and sensing. The design includes a microprocessor for sensor configuration, MEMS control registers access and video interface for providing scanning and synchronizing signals. It has been fabricated on 0.18μm high voltage CMOS process, and silicon proves the full functionality of the design concept.

Published in:

Integrated Circuits (ISIC), 2011 13th International Symposium on

Date of Conference:

12-14 Dec. 2011