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Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques

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2 Author(s)
Krupka, J. ; Inst. of Microelectron. & Optoelectron., Warsaw Univ. of Technol., Warsaw, Poland ; Mazierska, J.

Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in non-destructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.

Published in:

TENCON 2011 - 2011 IEEE Region 10 Conference

Date of Conference:

21-24 Nov. 2011