Cart (Loading....) | Create Account
Close category search window
 

Microfabricated silicon-on-Pyrex passive wireless wall shear stress sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Sells, J. ; Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL, USA ; Chandrasekharan, V. ; Meloy, J. ; Sheplak, M.
more authors

This paper presents the design, fabrication, and characterization of a passive wireless sensor for the measurement of wall shear stress. A micromachined variable-capacitor shear stress transducer is realized using a silicon-on-Pyrex microfabrication process. The design features a diamond-shaped 2.25 mm2 silicon floating-element to accommodate more comb fingers for improved capacitive transduction in a smaller die area. The variable-capacitor device is connected to a fixed inductor on a printed circuit board to enable passive wireless sensing. The nominal resonant frequency of the device is 168 MHz with a quality factor of 8.6. Calibrations of static shear stress in a flow cell show a linear response to over 4 Pa, with a frequency-shift sensitivity of 474 kHz/Pa (1.1% full scale). Theoretically a minimum detectable shear stress of 4.1 mPa can be resolved giving a 61.7 dB dynamic range.

Published in:

Sensors, 2011 IEEE

Date of Conference:

28-31 Oct. 2011

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.