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This study presents a novel temperature sensor consisting of the nano-textured Au-film on the nano-pores Anodic Aluminum Oxide (np-AAO) template. The np-AAO template enables the formation of nano-pores on the Au-film. The temperature change will lead to the variation of resistivity and nano-texture on metal film. Thus, the temperature sensor of negative TCR can be realized, and the sensitivity of temperature sensor can be improved. Measurement results show the TCR of Au-film (50nm) on np-AAO temperature sensor is 0.00218/°C (nonlinearity: 0.42% for heat-up, 3.72% for cool-down). As the Au-film increasing to 200nm and above, the temperature sensor on np-AAO has a TCR of -0.00598/°C. Thus, the sensitivity of temperature sensor is improved.
Published in:
Sensors, 2011 IEEE
Date of Conference: 28-31 Oct. 2011
- Page(s):
- 1253 - 1256
- ISSN :
- 1930-0395
- Print ISBN:
- 978-1-4244-9290-9
- INSPEC Accession Number:
- 12491529
- Conference Location :
- Limerick
- Digital Object Identifier :
- 10.1109/ICSENS.2011.6127250
- Product Type:
- Conference Publications
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