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Lowering the sensory threshold and enhancing the responsivity of biomimetic hair flow sensors by electrostatic spring softening

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5 Author(s)
Droogendijk, H. ; MESA+ Res. Inst., Univ. of Twente, Enschede, Netherlands ; Bruinink, C.M. ; Sanders, R.G.P. ; Siebelder, O.G.
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We report improvements in detection limit and responsivity of biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC voltage to our capacitive flow sensors results in a reduced sensory threshold, which gives an improvement for the flow detection limit of more than 30%. In addition, the mechanical transfer shows large (80% and more) voltage-controlled electro-mechanical amplification of the flow signal for frequencies below the sensor's resonance.

Published in:

Sensors, 2011 IEEE

Date of Conference:

28-31 Oct. 2011

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