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Noise considerations on hybrid optical MEMS displacement sensors

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9 Author(s)
Wilfried Hortschitz ; Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria ; Franz Kohl ; Matthias Sachse ; Michael Stifter
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Light flux modulators based on micro-opto-electromechanical systems (MOEMS) enable high resolution displacement based inertial sensors. To unveil the resolution limiting mechanisms, we investigated the performance of modulators with a rectangular aperture design. The two major noise sources for such devices are the Brownian noise originating from the surrounding air and the noise emerging from the opto-electronic photodetector. The experimental data suggests that the noise equivalent displacement is determined by the transmitive aspect ratio of the aperture.

Published in:

Sensors, 2011 IEEE

Date of Conference:

28-31 Oct. 2011