Cart (Loading....) | Create Account
Close category search window
 

Polysilicon thin film transistors fabricated at 100/spl deg/C on a flexible plastic substrate

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Carey, P.G. ; Lawrence Livermore Nat. Lab., CA, USA ; Smith, P.M. ; Thompson, M.O. ; Sigmon, T.W.

We present detailed device results from polysilicon TFT's fabricated at a maximum processing temperature of /spl les/100/spl deg/C on flexible plastic polyethylene terephthalate (PET) substrates. These substrates are low cost, flexible, rugged, and optically transparent which makes them suitable for transmissive AMLCD applications. Our TFT process uses 4 mask levels to define a self-aligned aluminum top-gate structure. Adding pixel capacitors requires two more mask levels. We use a /spl lambda/=308 nm XeCl excimer laser to both crystallize the as-deposited PECVD a-Si:H and to heavily dope the source-drain regions. An in situ IR laser probe allows monitoring and controlling of the Si melt depth. By varying the laser processing parameters of energy fluence and number of pulses at each location, we have succeeded in fabricating TFT's with I/sub on/I/sub off/ ratios of >10/sup 6/ and electron mobilities >5 cm/sup 2//V-s without substrate damage.

Published in:

Device Research Conference Digest, 1997. 5th

Date of Conference:

23-25 June 1997

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.