Cart (Loading....) | Create Account
Close category search window

Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Dehui Xu ; Sci. & Technol. on Microsyst. Lab., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China ; Bin Xiong ; Guoqiang Wu ; Yinglei Ma
more authors

A simple mass producible uncooled thermoelectric infrared microsensor has been designed and fabricated. To improve the cost-efficiency, an advanced micromachining process, which combines wet anisotropic pre-etching and XeF2 dry isotropic post-etching, is adopted for the sensor fabrication. The wet anisotropic pre-etching removes bulk silicon from back-side and forms a thin silicon membrane for device fabrication, the XeF2 dry isotropic post-etching undercuts silicon membrane and releases the microstructure. Experimental results show that the sensor with advanced micromachining exhibits a two times higher responsivity and detectivity than the sensor with only XeF2 front-side etching. In air at room temperature, the sensor with advanced micromachining has a responsivity of 71.57 V W-1, noise equivalent power of 0.64 nW Hz-1/2, detectivity of 6.21×107 cm Hz1/2 W-1 and a time constant of 13.2 ms. The effect of back-side etch window size on sensor performance is also characterized by finite-element method simulation.

Published in:

Sensors Journal, IEEE  (Volume:12 ,  Issue: 6 )

Date of Publication:

June 2012

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.