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Zoom-in front-end circuit for high-performance capacitive displacement sensors

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2 Author(s)
Sha Xia ; Delft Univ. of Technol., Delft, Netherlands ; Nihtianov, S.

We report an integrated front-end circuit for capacitive displacement sensors, suitable for measuring small displacements, superimposed on a much larger stand-off distance between the sensing and the target electrodes. In order to cancel the effect of the resulting offset capacitance, a circuit technique called electrical zoom-in is applied in the interfacing circuit. The zoom-in front-end can achieve an input referred capacitance resolution of 28 aF (RMS) from a sensor with nominal capacitance of 10 pF with a measurement latency of only 5 us.

Published in:

IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society

Date of Conference:

7-10 Nov. 2011