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After years of doping, straining, shrinking, and tweaking, engineers seem to have exhausted all their strategies for improving the planar complementary metal-oxide semiconductor (CMOS) transistors at the heart of today??s computer processors. Producers of cutting-edge chips are now resorting to new structures?? building up in three dimensions or constructing transistors in ultrathin layers of silicon??to ensure that devices keep shrinking and that Moore's Law keeps going just a bit longer.