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Nd-doped Bismuth Titanate based ferroelectric field effect transistor: Design, fabrication, and optimization

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11 Author(s)
Tingling Feng ; Tsinghua Nat. Lab. for Inf. Sci. & Technol. (TNList), Tsinghua Univ., Beijing, China ; Dan Xie ; Yongyuan Zang ; Xaio Wu
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Ferroelectric field effect transistor (FeFET) is a promising candidate in nonvolatile memory application due to its fast read/write speed, nondestructive readout, and low power consumption. Since the poor retention characteristic can be improved by introducing insulator buffer layers between gate layer and FET channel region, more and more attentions are devoted to the realization and optimization of this novel memory device [1]. Traditional ferroelectric materials, such as PZT [2, 3] and SBT [4] based FeFETs are extensively studied and reported in the past decades. Recently, Nd-doped Bismuth Titanate B3.15Nd0.85Ti3O12 (BNdT) with a large remnant polarization (2Pr=103μC/cm2) and outstanding fatigue endurance was reported by Chon et al. [5], and many ferroelectric applications are being processed based on this brand new ferroelectric material [6, 7]. In this letter, we fabricated a BNdT based FeFET for the first time. The fundamental structural and electrical properties are investigated correspondingly.

Published in:

Electron Devices and Solid-State Circuits (EDSSC), 2011 International Conference of

Date of Conference:

17-18 Nov. 2011