By Topic

Microwave hydrogen plasma annealing to improve electrical and optical properties of aluminum doped zinc oxide films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Shang-Chou Chang ; Department of Electrical Engineering, Kun Shan University, Tainan 71003, Taiwan ; To-Sing Li ; Bo-You Chen ; Tien-Chai Lin

To investigate whether microwave hydrogen plasma can improve the electrical and optical properties of aluminum doped zinc oxide (AZO) films or not, AZO films prepared with different substrate temperature were treated with microwave hydrogen plasma. The AZO films were post-treated by one 2.45 GHz microwave hydrogen plasma system with 25 torr, 700 W and 10 minutes. It was observed the electrical and optical properties of all AZO films prepared with different substrate temperatures were apparently improved with microwave hydrogen plasma. Taking 200°C produced AZO films as an example, the electrical resistivity decreases 43% and the average optical transmittance increases 7% respectively. Microwave hydrogen plasma makes AZO films recrystallization like process from measured results of X-ray diffraction, scanning electron micrograph and transmission electron micrograph. The oxygen adsorption on grain boundary of AZO films after microwave hydrogen plasma apparently decreases observed from results of X-ray photoelectron spectroscopy. The above two phenomena may be the mechanism why microwave hydrogen plasma cam improve the electrical and optical properties of AZO films. This work contributes to industries like touch panel, solar cells. etc. which transparent conductive films belong to the industry product's component.

Published in:

2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)

Date of Conference:

19-21 Oct. 2011