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Thermal modeling of three-dimensional integrated circuits considering the thermal removal capability of different TSVs

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5 Author(s)
Hua Ding ; Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong, China ; Wei Wang ; Zhiliang Qian ; Chi-ying Tsui
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In this paper, a thorough comparison of the heat removal capability of different types of through silicon vias (TSVs) for three-dimensional ICs is presented. It is shown that power TSVs with the associated power delivery network (PDN) has significantly better heat removal capability than the other types of TSVs. An accurate and efficient thermal simulation methodology is then proposed by incorporating an accurate heat removal model of the PTSVs and PDN. Experimental results show that the accuracy of the proposed methodology is close to that of detailed 3-D finite volume based heat solver, while the computational effort is much lower.

Published in:

Quality Electronic Design (ASQED), 2011 3rd Asia Symposium on

Date of Conference:

19-20 July 2011