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Ultra-high-Q micro-cavity on a silicon chip

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5 Author(s)
Tong Chen ; Thomas J. Watson, Sr., Lab. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA ; Hansuek Lee ; Jiang Li ; Painter, O.
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Optical resonators with quality factor as high as 750 million are demonstrated. These silicon-chip-based devices are fabricated without silica reflow, thereby expanding the range of integration opportunities and possible applications.

Published in:
Photonics Conference (PHO), 2011 IEEE

Date of Conference: 9-13 Oct. 2011

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