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Stress identification of thin membrane structures by dynamic measurements

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4 Author(s)
Michael, S. ; IMMS GmbH, Ilmenau, Germany ; Schaffel, C. ; Voigt, S. ; Knechtel, R.

A fast identification method of membrane stresses is investigated for an early stage of the manufacturing process. The approach consists of performing optical measurement of the out-of-plane modal responses of the membrane. This information is used in an inverse identification algorithm based on a FE model by an optimization.

Published in:

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on

Date of Conference:

11-13 May 2011