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This paper presents an investigation on the effect of geometrical dimensions on the conductive behaviour of a CMOS MEMS convective accelerometer. Numerous FEM simulations are conducted to prove the validity of a previously developed model. This model was firstly developed to represent the effect of only one geometrical parameter; the etched cavity depth. We prove here that this model may represent also the effect of other geometrical parameters, the cavity half-width and the package height, on the conductive behaviour of the sensor.