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Investigation on the effect of geometrical dimensions on the conductive behaviour of a MEMS convective accelerometer

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7 Author(s)
A. A. Rekik ; LIRMM - CNRS/Univ. Montpellier 2 - 161 rue Ada, 34095, France ; B. Mezghani ; F. Azaïs ; N. Dumas
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This paper presents an investigation on the effect of geometrical dimensions on the conductive behaviour of a CMOS MEMS convective accelerometer. Numerous FEM simulations are conducted to prove the validity of a previously developed model. This model was firstly developed to represent the effect of only one geometrical parameter; the etched cavity depth. We prove here that this model may represent also the effect of other geometrical parameters, the cavity half-width and the package height, on the conductive behaviour of the sensor.

Published in:

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2011 Symposium on

Date of Conference:

11-13 May 2011