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A new library for PolyMEMS-INAOE process

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3 Author(s)
Perez Tovar, F.W. ; SEPI ESIME Culhuacan, Inst. Politec. Nac. (IPN), Mexico City, Mexico ; Nino de Rivera y Oyarzabal, L. ; Arriaga, W.C.

MEMS design systems is usually supported by specialized MEMS CAD software that helping designers targeting of specific process technologies to ensure process compatibility and manufacturability with manufactures MEMS. MEMS CAD tools, among others, include Manufactures design rules, mask layers description, device descriptions for extraction, process parameters, material properties, and fabrication process descriptions. We discuss in this paper the design of a new library that includes the rules of the first Mexican manufactures PolyMEMS-INAOE. The PolyMEMS-INAOE offers a three polysilicon layer processes, the main rules are discussed and integrated to a commercial MEMS CAD software, MEMS Pro. The discussion presented in this paper will help PolyMEMS-INAOE users to integrate those rules to any other MEMS CAD software.

Published in:

Electrical Engineering Computing Science and Automatic Control (CCE), 2011 8th International Conference on

Date of Conference:

26-28 Oct. 2011