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Overview of RF high-permeability ferromagnetic thin films and its application to a new ferromagnetic/conductive multilayer to suppress skin effect in RF on-chip conductors

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4 Author(s)
Yamaguchi, M. ; Dept. of Electr. & Commun. Eng., Tohoku Univ., Sendai, Japan ; Endo, Y. ; Sato, N. ; Ludwig, A.

Ferromagnetic thin film materials with high permeability in the RF range are potential material for inductive passive components to endure “More-than-Moore” approach. This paper reviews state-of-the-art of ferromagnetic thin films and their applications for integrated inductors and electromagnetic noise suppressor. An innovative challenge to suppress skin effect in RF on-chip conductors is demonstrated, taking advantage of negative permeability of soft magnetic film obtained beyond the ferromagnetic resonance frequency.

Published in:

Microwave Integrated Circuits Conference (EuMIC), 2011 European

Date of Conference:

10-11 Oct. 2011