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The formation of bubble defects during UV-nanoimprinting can be prevented by carrying out the process in a 1,1,1,3,3-pentafluoropropane (PFP) gas environment. The authors therefore evaluated the curing time and the calorific value of UV-curable resins in a PFP gas environment by photo differential scanning calorimetry and their polymerization degree by Fourier transform infrared spectroscopy. The authors found that UV-curable resins polymerized more efficiently in PFP than in air because PFP dissolves in the resins.
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:29
,
Issue:
6
)
Date of Publication: Nov 2011
- Page(s):
- 06FC05 - 06FC05-4
- ISSN :
- 1071-1023
- Digital Object Identifier :
- 10.1116/1.3656022
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 15 December 2011
- Issue Date :
- Nov 2011
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