Skip to Main Content
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.3656022
The formation of bubble defects during UV-nanoimprinting can be prevented by carrying out the process in a 1,1,1,3,3-pentafluoropropane (PFP) gas environment. The authors therefore evaluated the curing time and the calorific value of UV-curable resins in a PFP gas environment by photo differential scanning calorimetry and their polymerization degree by Fourier transform infrared spectroscopy. The authors found that UV-curable resins polymerized more efficiently in PFP than in air because PFP dissolves in the resins.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:29 , Issue: 6 )
Date of Publication: Nov 2011