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An ultra-thin carbon nanomechanical resonator was fabricated from poly(methyl methacrylate) (PMMA) using focused-ion-beam (FIB) and electron-beam dual-beam lithography. A suspended PMMA structure was cured using an ion-beam modification technique using a 30-kV Ga+ FIB, and carbonized to a diamondlike carbon. In addition, we analyzed the vibrational properties of the cured PMMA nanowire to confirm that it functioned as a resonant structure.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:29 , Issue: 6 )
Date of Publication: Nov 2011