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Porous anodized aluminum oxide (AAO) nanostructures have been extensively investigated as versatile templates for nanodots and nanowires for many applications. Such self-ordered AAO structures are often achieved by so-called two-step anodization. Ordered pore arrangements can be obtained in the second step after removing the AAO layer formed in the first anodizing step, during which hexagonally ordered, concave-pored Al surface is formed so as to serve as vertical pore nucleation sites for the subsequent anodization step. Although such a two-step anodization process has proven useful for bulk Al surface, the relatively large amount of Al material that needs to be used up to obtain a well ordered AAO template is an issue when the starting material is a thin film layer of Al rather than a bulk Al foil. In this paper, we demonstrate successful fabrications of ordered and vertically aligned AAO nanopore patterns directed by a hexagonally patterned poly(styrene-b-4-vinylpyridine) di-block copolymer layer placed on a thin Al film surface. In addition, a successful electrodeposition of Ni nanowires into the AAO nanopores is demonstrated and their magnetization properties are studied.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:29 , Issue: 6 )
Date of Publication: Nov 2011