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Energy harvesting properties of all-thin-film multiferroic cantilevers

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4 Author(s)
Onuta, Tiberiu-Dan ; Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, USA ; Wang, Yi ; Long, Christian J. ; Takeuchi, Ichiro

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We have measured electromagnetic energy harvesting properties of all-thin-film magnetoelectric (ME) heterostructures on Si cantilevers. The devices are built on a silicon oxide/nitride/oxide stack, and the ME layers consist of a magnetostrictive Fe0.7Ga0.3 thin film and a Pb(Zr0.52Ti0.48)O3 piezoelectric thin film. The harvested peak power at 1 Oe is 0.7 mW/cm3 (RMS) at the resonant frequency (3.8 kHz) with a load of 12.5 kΩ. The resonant frequency was found to display DC bias magnetic field dependence indicative of a magnetization canting with respect to the cantilever easy axis as a result of interplay between the anisotropy and Zeeman energies.

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Applied Physics Letters  (Volume:99 ,  Issue: 20 )