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Pentacene thin film deposition with high uniformity of 2.7% on flexible polyethylene terephthalate (PET) substrate is achievable over area of 300 mm× 500 mm using a simple roller vacuum thermal evaporation system with point sources. Thickness numerical simulations, agree well with measurements, indicate that the multi-dimensional movement of the cylindrical sample holder guarantees film uniformity over a larger area. High device performance with excellent uniformity and reproducibility is demonstrated by pentacene-based thin film transistor arrays on large PET substrates with average saturation mobilities of 0.42 cm2/V s. The system provides a feasible thin film deposition architecture for large-scale organic electronics.
Published in:
Applied Physics Letters
(Volume:99
,
Issue:
18
)
Date of Publication: Oct 2011
- Page(s):
- 183304 - 183304-3
- ISSN :
- 0003-6951
- Digital Object Identifier :
- 10.1063/1.3657411
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 12 December 2011
- Issue Date :
- Oct 2011
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