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Silicon two-dimensional phononic crystal resonators using alternate defects

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4 Author(s)
Wang, Nan ; Department of Electrical and Computer Engineering, National University of Singapore, Singapore ; Hsiao, Fu-Li ; Palaniapan, Moorthi ; Lee, Chengkuo

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We present the numerical and experimental investigations of micromechanical resonators made by creating alternate defects with different central-hole radii (r′) in a two-dimensional (2-D) phononic crystal (PnC) slab. The PnC structures were fabricated by etching a square array of cylindrical air holes in a 10 μm thick free-standing silicon plate using a CMOS-compatible process. Preliminary experimental results show that the performance of the PnC resonators in terms of resonant frequency, Q factor, and insertion loss (IL) is highly dependent on r′. A Q factor of more than 3000 is achieved for the case of r′ = 6 μm while all the designed resonators with alternate defects have higher Q factor and lower IL than the resonators based on the normal Fabry-Perot structure due to the reduction in the mode mismatch.

Published in:

Applied Physics Letters  (Volume:99 ,  Issue: 23 )