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Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

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3 Author(s)
Bhalla, N. ; Dept. of Electron. Eng., Chung Yuan Christian Univ., Chungli, Taiwan ; Sheng-Shian Li ; Chung, D.W.-Y.

The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

Published in:

Semiconductor Conference (CAS), 2011 International  (Volume:2 )

Date of Conference:

17-19 Oct. 2011