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New polyimides have been synthesized by reaction of 3,3',4,4'-benzophenone tetracarboxylic dianhydride (BTDA) or/and 5-[2,5-(dioxotetrahydrofuryl)]-3-methyl-3-cyclohexen-1,2-dicarboxylic anhydride (DOCDA) with 4,4'-methylene dianiline (DDM). Polycondensation reactions were carried out in solution and resulting polyimides gave flexible free-standing films. The introduction of alicyclic moieties in the polyimide backbone improved their solubility, giving thermally stable films. The relative dielectric constant values was in range of 3.16-2.86 measured at 1kHz and room temperature, and decreased with increasing of the alicyclic units content.
Semiconductor Conference (CAS), 2011 International (Volume:2 )
Date of Conference: 17-19 Oct. 2011